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ASRC Nanofabrication Facility - NanoDocs Staff

Home
Tool SOPs
Tool SOPs
- Lithography SOPs
  Lithography SOPs
- Deposition SOPs
  Deposition SOPs
- Etcher SOPs
  Etcher SOPs
- Metrology SOPs
  Metrology SOPs
- Packaging SOPs
  Packaging SOPs
  - Dicing Saw
Chemical Processing
Chemical Processing
- Litho-Development Hood
  Litho-Development Hood
- Solvent / Lift-Off Hood
  Solvent / Lift-Off Hood
- Caustics / Metal-Etch Hood
  Caustics / Metal-Etch Hood
- HF and Piranha Hood
  HF and Piranha Hood
  - Hydrofluoric Acid Etch
  - Piranha Clean
- RCA Hood
  RCA Hood
  - RCA Cleaning Procedure
Safety Policies
Safety Policies
Lab Signup
Lab Signup
FAQ
FAQ
Export Tests
Export Tests
- Cr Etch
- Elionix`
Staff
Staff

Helpful Documentation Links¶

Wikimedia Commons - ISO 7010 Warning signs
Vecteezy.com -- Safety sign standards - ISO 7010

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